International Journal of Engineering Research in Electrical and Electronic Engineering (IJEREEE)

Analysis, Modeling and Simulation of Fixed Beam Cantilever Using Eigen Frequency

Author : B Jyoti ¹ Girija.M.Nimbal ² S.V.Halse ³

Date of Publication :7th January 2016

Abstract: The modeling is performed by using the finite element analysis software, COMSOL Multiphysics, Structural Mechanics modules, version 4.3. The purpose of the study of static analysis is to find the magnitudes and locations of the maximum strain, stress, and electrical potential on the cantilever beam when an external static load is applied to the beam’s free end. The eigen frequency analysis is then performed to find the first six modes of frequencies and the deformation pattern of the beam. The time-dependent analysis is used to solve for the transient solution when the applied external load is time dependent and has a frequency that is close to the beam’s 1st natural frequency. Such a dynamic load should cause the beam to have maximum strain, stress, and electrical potential than a dynamic load with a frequency further away from the beam’s natural frequency. In this paper analysis modeling and simulation of natural frequency of a fixed –end beam made of silicon, with a geometry and dimensions of beam having width 40x10-6 m, depth (thickness) 6x10-6 m, length 600x10-6 m. and subjected to a longitudinal stress at 187MPa.

Reference :

1. MEMS and Microsystems Design and Manufacture by Tai – Ran Hsu Tata MC Graw-Hill Edition 2002
2. MEMS Nitaigour Premchand Mahalik Published by Tata McGraw Hill Education Private Limited 2011.
3. Foundations of MEMS by Chang Liu Second Edition ISBN 978- 81-317-6475-6 2012.
4. Micro and Smart Systems by G.K.Anathasuresh
5. Finite Element Analysis Of Composite Piezoelectric Beam Using Comsol, by Metwally Emam June 2008.
6. Design, Electrostatic and Eigen Frequency Analysis of Fixed–Fixed Beam MEMS Resonator Deepak Kumar, A. Vimala Juliet IOSR Journal of Electronics and Communication Engineering (IOSR-JECE) e-ISSN: 2278-2834,p- ISSN: 2278- 8735. Volume 5, Issue 6 (Mar. - Apr. 2013), PP 19- 23
7. Frederic Nabki, Karim Allidina, Faisal Ahmad, Paul-Vahe Cicek, Mourad N. El Gamal, “Highly Integrated 1.8 GHz Frequency Synthesizer Based on a MEMS Resonator” IEEE Journal of solid-state circuits, Vol. 44, No.
8. August 2009, 2154-2168. 8. G.Meenakshi sundaram, Mahesh Angira, Kamaljit Rangra “Design and Simulation of two port RF MEMS Resonator” International Conference on Computer Communication and Informatics (ICCCI - 2012), Jan. 10 – 12, 2012, Coimbatore, INDIA.
9. Vivek Harshey, Amol Morankar, Dr. R.M. Patrikar “MEMS Resonator for RF Applications” Proceeding of the 2011 COMSOL Conference in Banglore, INDIA.