International Journal of Engineering Research in Electrical and Electronic Engineering (IJEREEE)

Design, Fabrication and Testing of Integrated Nano-Scale Vibration-Based Prototype Model of Electromagnetic Generator

Author : Antonio Dias ¹ Jeevesh Jadhav ² Rachana Chougule ³ Sangeeta M Raibagi ⁴

Date of Publication :7th January 2016

Abstract: This paper discusses the design, fabrication and testing of electromagnetic nanogenerators. Three different designs of power generators are partially nano-fabricated and assembled. PrototypeA having a wire-wound copper coil, Prototype B, an electrodeposited copper coil both on a deep reactive ion etched (DRIE) silicon beam and paddle. Prototype C uses moving NdFeB magnets in between two nano-fabricated coils. The integrated coil, paddle and beam were fabricated using standard Nano-electromechanical systems (NEMS) processing techniques. For Prototype A, the maximum measured power output was 148nW at 8.08 kHz resonant frequency and 6.8 m/s2 acceleration. For Prototype B, the nano generator gave a maximum load power of 23nW for an acceleration of 9.8 m/s2, at a resonant frequency of 18.83 kHz. This is a substantial improvement in power generated over other nano-fabricated silicon-based generators reported in literature. This generator has a volume of 0.1 cm3 which is lowest of all the silicon-based nano-fabricated electromagnetic power generators reported. To verify the potential of integrated coils in electromagnetic generators, Prototype C was assembled. This generated a maximum load power of 586nW across 110 load at 60 Hz for an acceleration of 8.829 m/s2.

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